| DC Magnetron Sputtering &evaporation coater | |
| Model No. | HS-1100X-SPC-16C |
| Target diameter | Φ50mm |
| Sample stage | Φ50mm |
| Chamber dimension | Φ160*110mm |
| Vacuum degree | 4×10-1mbar-2×10-2mbar |
| Maxi working current | 50mA |
| Maxi Time setting | 9999s |
| Maxi voltage | 1600VDC, adjustable |
| Vacuum pump | Two stage rotary vacuum pump |
| Working voltage | AC220V 50Hz |