Dual target magnetron sputtering coater with reciprocating sample stage

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Product Details

HS-MSP500S-DCRF-RE is a laboratory-specific magnetron sputtering coater with two target positions developed by our company. The equipment is equipped with a DC power supply and a radio frequency power supply, which can be used to prepare single or multilayer iron Electrical film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.

Features of magnetron sputtering coater:
a. Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and speed, high coating rate, low sample temperature rise, and is a typical high-speed low-temperature sputtering.
b. The magnetron sputter target is equipped with a water-cooled interlayer. The water-cooled machine can effectively take away the heat and avoid the heat accumulation on the target surface, so that the magnetron sputter can work stably for a long time.
c. The sample stage adopts a reciprocating design, and the left side is equipped with a magnetic coupling push rod, which can push the sample stage left and right.
d. The whole machine adopts touch screen control, built-in one-button coating program, easy to operate, it is an ideal equipment for laboratory preparation of films

Technical parameters of magnetron sputtering coater:

Model		HS-MSP500S-DCRF-RE
Input		AC220V，50Hz
Total power		6KW
Ultimate vacuum degree		5x10-4Pa
Sample table parameters	Size	100mm x 100mm
	Reciprocating stroke	200mm
Magnetron sputtering head parameters	Quantity	2-set, 2-inch
	Cooling mode	Water cooled, required flow rate10L/min
	Water chiller	10L/min circulating water cooling
Vacuum chamber	Size	φ500mm x 490mm H
	Material	Stainless steel
	Watch window	φ100mm
	Open mode	front opening door
Gas flow controller		1channel 200sccm Ar;
Vacuum pump		Molecular pump system pumping 600L/S
Film thickness gauge		Quartz vibrating film thickness gauge, one set, Resolution 0.10 Å
Sputter power supply		DC power supply: one set, 500W, for preparing metal films RF power supply: one set, 500W, for non - metallic coating
Operating modeAll-in-one computer operation		All-in-one computer operation
Overall dimensions		1090mm x 900mm x 1250mm
Total weight		350kg

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