| Single heating zone tube furnace |
Product model |
HS-O1200-100IT |
| Furnace tube material |
High purity quartz |
| Tube diameter |
100mm |
| Furnace tube length |
1500mm |
| Furnace chamber length |
440mm |
| Heating zone length |
400mm |
| Constant temperature zone head |
200mm |
| Operating temperature |
0～1100℃ |
| Temperature control accuracy |
±1℃ |
| Temperature control mode |
30 or 50 segment program temperature control |
| Display mode |
HD full color LCD touch screen |
| Sealing method |
304 stainless steel vacuum flange |
| Power supply |
AC: 220V 50/60Hz |
| RF output system |
Power range |
0~500W adjustable |
| working frequency |
13.56MHz+0.005% |
| Working mode |
Continuous output |
| Matched impedance mode |
It can be matched, and the glow is evenly distributed throughout the furnace tube |
| Power stability |
≤2W |
| Normal working reflected power |
≤3W |
| Amplified reflected power |
≤70W |
| Harmonic component |
≤-50dBc |
| Overall efficiency |
≥70% |
| Power factor |
≥90% |
| Supply voltage/frequency |
Single-phase AC (187V~153V) frequency 50/60Hz |
| Control mode |
Internal control/PLC analog quantity/RS232/485 communication |
| Power protection settings |
DC over current protection, power amplifier over temperature protection, reflected power protection |
| Cooling method |
Forced air cooling |
| Glow zone |
Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube |
| Gas delivery system |
Flowmeter |
Four-channel mass flowmeter |
| Flow range |
MFC1 range: 0~200sccm MFC2 range: 0~200sccm
MFC3 range: 0~500sccm MFC4 range: 0~500sccm
Corresponding to gases H2, CH4, N2, Ar.
|
| Measurement accuracy |
±1.5%F.S |
| Repeatability |
±0.2%FS |
| Linear accuracy |
±1%F.S. |
| Response time |
≤4s |
| Work pressure |
-0.15Mpa~0.15Mpa |
| Flow control |
LCD touch screen control, digital display, each channel gas contains needle valve for individually control. |
| Intake interface |
It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe |
| Outlet interface |
It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe |
| Connection method |
Double ferrule connector |
| Operating temperature |
5~45℃ |
| Gas premix |
Equipped with gas premixing device |
| Exhaust system |
Product model |
HS-GZK103-A |
| Molecular pump |
Turbomolecular pump |
| Backing pump |
Two-stage rotary vane pump |
| Pumping rate |
Molecular pump: 600L/S |
Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa |
| Rotary vane pump: 1.1L/S |
| Ultimate vacuum |
5×10E-4Pa |
| Pumping port |
KF40 |
| Exhaust interface |
KF16 |
| Vacuum measurement |
Compound vacuum gauge |
| Rotating and tilting device |
Speed range |
0-20rpm |
| Tilt angle |
0-15° |
| Material feeding and receiving system |
Automatic feeding, automatic collection after tilting |
