| Item | Detail |
| Supply voltage | AC220V,60Hz |
| Max. power | 1000W |
| Sample stage | Diameterφ60mm |
| Quartz chamber | O.Dφ180mm x I.Dφ166mm x 100mm |
| Evaporation source | Tungsten basket/tungsten boat |
| Max temperature | 1700℃ |
| Thermocouple | B-type, working temperature 200℃~1500℃ |
| Vacuum gauge | Resistance type vacuum gauge |
| Vacuum interface | KF16 |
| Inlet interface | φ6.35mm Bite type fittings |
| Vacuum pump | No, the customer provides it |
| Dimensions | 330x250x580mm |