Multi arc ion coating equipment

Products Inquiry

Name * :

Tel * :

Email :

CompanyName :

Message :

Product Details

Multi-arc ion plating is the use of gas discharge or partial ionization of evaporated substances, while gas ions or particles of evaporated substances are bombarded, the evaporated substances or reactants are deposited on the substrate. Ion plating combines the glow discharge, plasma technology and vacuum evaporation organically, which not only significantly improves the film quality, but also expands the application range of the film. It has the advantages of fast evaporation rate, strong film adhesion, good diffraction, and extensive film materials. It is very suitable for plating hard protective film such as TiN. At the same time, because it can change the color of the film by controlling the atmosphere, and the film is firmly combined with the substrate, it can also be used to make decorative films of various colors.
Features of multi arc ion coating equipment
This equipment is equipped with two multi-arc targets, which are placed on both sides of the chamber. Cooperating with the planetary sample stage can effectively improve the coating efficiency and improve the effect.
The coating instrument also adopts an integrated design, the chamber and the electric control part are separated on the left and right, which realizes the separation of water and electricity, and effectively guarantees the safety of users.

Technical parameters of multi arc ion coating equipment:

Model	HS-MIOP500S-2TA
Vacuum chamber	Water cooled stainless steel chamber; φ500mm x 490mmH; Front door type, φ 100 mm quartz observation window; Built in two sets of infrared heating lamps, can be used for baking and degassing the chamber; Multiple CF interfaces are reserved for installation of multi-channel film thickness meter
Gas system	Mass flow meter: Ar gas 0~200sccm, N2 gas 0~200sccm other flow or gas can be customized
Power supply	AC 220V;50Hz;10kW
Control system	15" touch screen configuration control software
Multi arc target	Quantity and SPEC	2-set;3inches
	Installation method	Chamber side, opposite
	Working current	0~150A
	Target thickness	50mm, Min. 20mm
Sample stage	Specification	Planetary hanger
	Number of samples	There are 6 hanging points on each hanger, totally 6 hangers
	Rotation speed	Revolution speed 1~20rpm
Vacuum system	Model	HS-GZK103-A
	Molecular pump	Turbo molecular pump
	Backing pump	Double stage rotary vane pump
	Pumping	molecular pump: 6000L/S	Comprehensive pumping performance: 30 minutes vacuum degree up to: 5×10E-3Pa
		Rotary vane pump: 1.1L/S
	Ultimate vacuum	5×10E-4Pa
	Extraction interface	KF40
	Exhaust interface	KF16
	Vacuum measurement	Composite vacuum gauge

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.