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Plasma testing equipment

This equipment is customized plasma testing equipment for customers. The main component of the equipment is an inductively coupled plasma generator. The generator can generate plasma in the quartz tube inside the inductance coil. The flanges on both sides of the quartz tube are equipped with observa
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Product Details

This equipment is customized plasma testing equipment for customers. The main component of the equipment is an inductively coupled plasma generator. The generator can generate plasma in the quartz tube inside the inductance coil. The flanges on both sides of the quartz tube are equipped with observation windows. Users can observe experimental phenomena on the observation window or use other The instrument measures relevant parameters. The device is controlled by a touch screen, and the screen integrates all experimental functions, such as vacuum extraction, flow control, and RF power adjustment. At the same time, the inductance coil adopts water cooling design, and the outer casing has a cooling fan to ensure the stability of the whole equipment for a long time. This equipment is an indispensable instrument for the research of plasma-related properties in college laboratories.

Technical parameters of plasma testing equipment:
 Item Details
 Supply voltage AC220V, 50Hz
 Maximum power 1KW
 Coupling method Inductive coupling
 Quartz chamber O.Dφ30mm x 150mm wall thickness 3.5mm
 Observation window size φ30mm
 Vacuum interface KF16
 Air inlet interface 6.35mm ferrule connector
 Mass flowmeter Ar calibration range 100sccm
 Vacuum pump Bipolar rotary vane vacuum pump
 Ultimate vacuum 0.1Pa
 Cooling method Water-cooled copper tube + air-cooled shell
 RF power supply

Maximum output power 300W

Automatic matching
 Overall size 560mm x 620mm x 620mm
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