Power supply |
AC220V, 50Hz |
Chamber material |
PTFE |
Upper cover |
PVC (Polyvinyl chloride, for observing the coating state conveniently) |
Sample stage |
Gold-plated copper plate, with good thermal conductivity |
Substrate size |
Diameter ≤ 4 inches (100mm) |
Heating mode |
Ceramic heating ring |
Operating temperature |
RT-200℃ |
Rotation speed |
0-3000rpm |
Speed resolution |
1rpm |
Operation Mode |
7 inch HD LCD touch screen |
Glue dropping mode |
Manual glue dispensing, liquid can be supplied during spin coating |
Liquid drain pipe and waste liquid tank |
PTFE |
Spin coating curve |
Each curve has 5 segments, a total of 5 curves can be stored |
Vacuum chuck |
Gold-plated, 3 pieces with diameters of 10mm, 25mm, 55mm |
vacuum pump |
Oil-less pump |
Pumping speed |
50 L/min |