| Item | Detail | |
| Spin coater | Supply voltage | AC220V, 50Hz |
| Spin speed | 0~8000rpm | |
| Acceleration | 100~5000rpm/s | |
| Speed resolution | 1rpm | |
| Single step time | 3000s | |
| Substrate size | Diameter ≤ 4 inches (100mm) | |
| Chamber material | Plexiglass | |
| Operation method | Button + LCD screen | |
| Dispensing method | Manual dispensing, optional precision syringe pump | |
| Coating curve | 5 segments per curve, a total of 5 curves can be stored | |
| Pumping port | Φ8mm quick screw joint | |
| Overall size | 210mm×250mm×180mm | |
| Total Weight | 8kg | |
| Exhaust system | Vacuum pump | Dry mechanical pump |
| Pumping rate | 1.1L/s | |
| Power supply | AC220V 50/60Hz |