model | Effective space | design pressure | Furnace weight | Maximum temperature | Vacuum limit | Vacuum limit | Cooling time | Temperature uniformity | power (KW) | Temperature control method | Gas | Floor area (m) |
SIP410 | Ø410*800 | 6/10MPa | 200KG | 2000℃ | 0.5Pa | 5Pa/h | ≤4H | ±7℃ | 60 | 一区 | Ar N2 H2 CH4 |
5*6*6 |
SIP510 | Ø510*1300 | 500KG | ≤8H | 360 | 三区 | 6*7*6 | ||||||
SIP800 | Ø800*2000 | 1T | ≤10H | 640 | 四区 | 7*8*6 |