Small desktop single-target DC magnetron sputtering coater HS-MSP180G-DG

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Product Details

The magnetron target head of the DC magnetron sputtering coater has 1 inch and 2 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 150W DC power supply, which can be used for metal sputter coating. The coating machine is equipped with gas inlet port for the introduction of protective gas. If the customer needs the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs. The instrument is equipped with advanced turbomolecular pump set, the ultimate vacuum is up to 1.0E-5pa, and other types of molecular pumps are also available.

Small desktop single-target DC magnetron sputtering coater application:
The device can be used to prepare single-layer ferroelectric thin films, conductive films, alloy films, and so on. Compared with similar equipment, the single-target magnetron sputtering coater is compact, highly integrated and small in size, and can be placed on a desktop. It is an ideal equipment for laboratory preparation of material films.

Small desktop single-target DC magnetron sputtering coater technical parameters:

Sample stage	Size	φ138mm
	Heating temperature	Max 500℃
	Temperature accuracy	±1℃
	Rotational speed	1-20rpm adjustable
Magnetron Sputtering head	Quantity	2”×1 (1”, 2” optional)
	Cooling mode	Water cooling
	Water chiller	Circulating water chiller with flow rate of 10L/min
Vacuum chamber	Chamber size	φ180mm×215mm
	Chamber material	High purity quartz
	Watch window	Fully transparent
	Opening mode	Top cover removable
Mass flowmeter	2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)
Vacuum system	Model	CY-GZK103-A
	Molecular pump	CY-600
	Backing pump	Rotary vane pump
	Ultimate vacuum	1.0E-5Pa
	Pumping interface	KF40
	Exhaust interface	KF16
	Vacuum measurement	Compound vacuum gauge
	Power supply	AC;220V 50/60Hz
	Pumping rate	Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes
Power configuration	Quantity	DC power supply×1
Power configuration	Max output power	150W
Other parameters	Supply voltage	AC220V,50Hz
	Total power	1.7KW (Vacuum pump 1.5KW+machine 0.2KW)
	Overall size	500mm×350mm×400mm
	Total Weight	About 30kg

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