Compact 500W RF Generator with Auto Matching Network for RF Sputtering HS-RF500

RF generator is form a complete set of plasma power supply,it is composed by by the rf power source, impedance matching unit and the impedance of power meterIt is widely used for RF Sputtering, PECVD Chemical Vapor Deposition,and Reactive-ion Etching and etc.Product Name

Products Inquiry

Name * :

Tel * :

Email :

CompanyName :

Message :

Product Details

RF generator is form a complete set of plasma power supply,it is composed by by the rf power source, impedance matching unit and the impedance of power meter
It is widely used for RF Sputtering, PECVD Chemical Vapor Deposition,and Reactive-ion Etching and etc.

Product Name	RF Generator
RF power	13.56MHz±0.005%
Output Power Range	0-500w, adjustable
Working mode	Continuous output
Display	LCD
RF output Impedance	N-type, female,50Ω
Power stability	≤2w
Maximum reflection power	200w
Componentes armonicos	<-50dBc
Response time	200ms
Control Mode	PLC/RS232/485
Tube Diameter	Φ50,60,80,100mm
Cooling method	Forced air cooling
Dimension	380320450mm
Gross weight	30kg