Product Description
HS mini CVD tube furnace with 3 MFCS / CVD furnace system
The HS-1200CVD series furnace workstation consists of a HS-O1200 series mini tube furnace,a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200C. The ultimate vacuum rate goes to 10^-5 torr .The mass flow gas control station mixes three kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.
| Product | HS-1200CVD system |
| Chamber Type | Split Chamber |
| Display | LED digital display |
| Chamber Material | Alumina Fiber |
| Heating Element | Resistance wire |
| Max Temperature | 1200°C |
| Usable Range | ≤1100°C |
| Heating Rate | ≤20°C(suggestion:10°C/min) |
| Heating Zone | Single |
| Heated length | 220mm |
| Length constant temperature | 100mm |
| Tube Material | High purity quartz |
| Tube Size | Φ50mm x700mm |
| Vacuum Seal | 1.03×10-3Pa |
| Temperature Control | PID automatic control via SCR power control |
| Accuracy | ±1°C |
| Preset curve | 10 |
| Thermocouple | K Type |
| Working Voltage | 220V 50Hz~60Hz |
| Max. Power | 1.8KW |
| Gas Channels | 3 gas channels (can be designed as your requirement) |
| Gas controller | MFCS with range of 0 -500 sccm |
| Vacuum pump | 10 Pa Rotary vacuum pump
10(-4) Pa high vacuum pump system |
Service
1. Factory prices with the best quality.
2. One year free-of-charge maintenance for all the dental equipment
3. Customized service for special demand
4. Fast and flexible delivery, by sea, by air, by express
5. Quick response within 24 hours
How to order
1. If you are interested in our products, please tell us the model number and quantity.
2. We will make a proforma invoice for your order.
3. We will deliver the product ASAP on receipt of the payment
Guarantee
1. Guarantee for one year after shipment.
Payment
1. Western Union
2. PayPal
3. Secure Payment through Alibaba
4. Telegraphic transfer
5. L/C
