1200℃ high-vacuum rapid annealing furnace

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Product Details

The 1200℃ rapid annealing furnace is essentially a set of sliding tube furnace, which realizes the functions of heating and annealing. The intake end is equipped with a high-precision three-way mass flow meter to accurately control the atmosphere in the tube; at the same time, the equipment is equipped with a turbo molecular pump, which can quickly achieve a high vacuum environment and maximize the interference of the air atmosphere to the experiment.
The sliding furnace is composed of 1200℃standard single heating zone tube furnace and high precision slide rail. Tube furnace adopts resistance wire heating, combined with polycrystalline fiber furnace chamber, which has excellent temperature rise and thermal insulation performance. The slide rails are tightly matched, slide smoothly, and easy to operate. At the same time, it adopts full-color LCD touch screen operation, which is simple and intuitive, easy to use, can simplify the experimental operation and save the test time.

Technical Parameters of 1200℃ rapid annealing furnace:

	Item	Detail
1200℃ Tube furnace	Voltage	AC220V,50Hz
	Max power	4KW
	Heating zone	Single zone 440mm
	Working temperature	≤1200℃
	Temperature control accuracy	±1℃
	Temperature control method	AI-PID 30-stage process curve, can store multiple
	Tube material	High purity quartz
	Tube size	φ80mm I.D x 1000mm L
	Sealing mode	Stainless steel vacuum flange
	Vacuum measurement	Mechanical pressure gauge
	Working gas	Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
Three-way mass flowmeter	Valve type	Stainless steel needle valve
	Gas channels	Three-way
	Pressure range	0.05~0.3MPa
	Range	0~100 SCCM (H2) 0~200 SCCM（Ar） 0~500 SCCM（CH4）
	Flow control range	±1.5%
	Mixing tank volume	750mL
	Gas path material	304 stainless steel
	Pipe interface	6.35mm Bite type joint
	Power supply	AC220V 50Hz

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