| Preheating furnace | Model | HS-O1200-100I-T-S |
| Chamber length | 300mm | |
| Heating zone length | 200mm | |
| Constant temperature zone | 100mm | |
| Working temperature | 0~1100℃ | |
| Temperature control accuracy | ±1℃ | |
| Temperature control mode | 30 or 50 segment program temperature control | |
| Display mode | LCD (HD full color touch screen) | |
| Power supply | AC:220V 50/60Hz | |
| Single heating zone tube furnace | Model | HS-O1200-100I-T |
| Chamber length | 440mm | |
| Heating zone length | 400mm | |
| Constant temperature zone | 200mm | |
| Working temperature | 0~1100℃ | |
| Temperature control accuracy | ±1℃ | |
| Temperature control mode | 30 or 50 segment program temperature control | |
| Display mode | LCD (HD full color touch screen) | |
| Power supply | AC:220V 50/60Hz | |
| Furnace tube | Tube material | High purity quartz |
| Tube length | Φ100mm×1800mm | |
| Sealing method | 304 stainless steel vacuum water cooled flange | |
| Flange interface | 1/4" ferrule connector | |
| Gas supply system | Flowmeter | Two-channel mass flowmeter |
| Flow range |
MFC1 range: 0~200SCCM MFC2 range: 0~200SCCM |
|
| Measurement accuracy | ±1.5% F.S | |
| Repeatability | ±0.2% FS | |
| Linear precision | ±1%F.S. | |
| Response time | ≤4s | |
| Work pressure | -0.15Mpa~0.15Mpa | |
| flow control |
LED highlight digital tube display, button adjustment Each channel gas contains a needle valve for individual control |
|
| Intake interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube | |
| Outlet interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube | |
| Connection method | Double ferrule connector | |
| working temperature | 5~45℃ | |
| Exhaust system | Mechanical pump | Rotary vane pump |
| Pumping rate | 1.1L/S | |
| Exhaust interface | KF16 | |
| Vacuum measurement | Resistance gauge | |
| Ultimate vacuum | 1.0E-1Pa | |
| Power supply | AC:220V 50/60Hz | |
| Pumping interface | KF16 | |
| Sliding Rail | Rail length |
1.8m~2m It can realize the sliding of the length of one furnace position of two furnaces, and realize the rapid temperature rise and fall. |