PECVD tube furnace with roll to roll system

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Product Details

The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200℃2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-channel mass flowmeter gas mixer system. The whole machine can work in the vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment.

Technical parameters of roll to roll PECVD tube furnace:

1200℃ Two-heating-zone tube furnace	Voltage	AC220V,50Hz
	Max power	3KW
	Heating zone	Dual zones 200mm+200mm
	Working temperature	≤1200℃
	Temperature accuracy	±1℃
	Temperature control method	AI-PID 30-stage process curve, can store multiple
	Tube material	High purity quartz
	Tube size	φ80mm I.D x 1400mm L
	Sealing mode	Stainless steel vacuum flange
	Vacuum measurement	Resistance gauge
	Working gas	Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
	Vacuum pump	Bipolar rotary vane vacuum pump
	Ultimate vacuum	10^-1Pa
Three-channel mass flowmeter	Valve type	Stainless steel needle valve
	Gas channels	Three-way
	Pressure range	0.05~0.3MPa
	Range	0~100 SCCM (Ar) 0~200 SCCM(H2) 0~500 SCCM(CH4)
	Flow control range	±1.5%
	Mixing tank volume	750mL
	Gas path material	304 stainless steel
	Pipe interface	6.35mm Bite type joint
	Power supply	AC220V 50Hz
RF power	Output Power	500W
	Output accuracy	±1%
	RF frequency	13.56MHz
	RF stability	±0.005%
	Cooling method	Water cooling

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