Desktop single target magnetron sputtering coater with film thickness gauge

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Product Details

This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. It can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.

This model can be equipped with a film thickness meter, which can monitor film thickness data in real time and provide reliable parameters for the experimental process.

Features:
Using a quartz vacuum chamber, the coating process is omnidirectionally visible, which is convenient for observation and recording of experiments.

The chamber design is convenient and easy to clean, which is very suitable for laboratory use.

At the same time, the equipment is equipped with a rotating heating sample stage, which can effectively improve the uniformity of the film and the quality of the film.

The whole machine adopts modular design, simple operation logic and intuitive operation interface, which is easy to get started.

Technical parameters:

Sample stage	Size:100mm Rotary speed:1-20r/min Heating temperature:≤500℃ Temperature control accuracy:±1℃
Magnetron sputtering head	Quantity: one piece Size:2-inch Cooling mode:water cooling
Vacuum chamber	Size:φ180mm x 215mm Watch window:Omani-directional visual Material:high purity quartz Opening mode:Removable top cover
DC power supply	Quantity:1set Output power:≤300W Output voltage:≤600V Response time:＜5ms
Water cooling	Tank capacity:9L Flow:10L/min
Film thickness gauge	Measuring accuracy:0.1 angstrom Cooling mode:water cooled
Other	Power supply:AC220V,50Hz Whole power:1kw

Note:

This equipment does not contain a vacuum pump. Users should use it with a molecular pump set. We recommend our CY-GZK103A pump set.

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