Desktop single sputter head magnetron sputtering coater (for depositing aluminum)

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Product Details

This equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a high-performance DC power supply with target refining function, which can effectively remove the oxide layer on the surface of the aluminum target. It is very suitable for aluminum plating and other materials that are very sensitive to air. This equipment has compact structure and perfect function and is easy to use, and is very suitable for various coating tests.

Technical parameters:

Sample stage	Size	φ100mm
	Rotating speed	0-20rpm adjustable
	Heating	Max. 500℃
Magnetron sputtering head	Quantity	2" x1
Vacuum system	Chamber size	φ180mm x 215mm
	Observation window	Omnidirectional transparent
	Chamber material	High purity quartz
	Open method	Upper cover removable
Power configuration	Mechanical pump	Rotary vane pump
	Pumping port	KF16
	Exhaust interface	KF16
	Molecular pump	Turbomolecular pump
	Pumping port	KF40
	Exhaust interface	KF40
	Vacuum measurement	Resistance gauge + ionization gauge
	Ultimate vacuum	1.0E-4Pa
	Power supply	AC 220V 50/60Hz
	Pumping rate	Mechanical pump 1.1L/s Molecular pump 600L/s
Power configuration	Quantity	DC power supply x1
	Max. output power	DC power supply 500W
	Supply voltage	AC220V, 50Hz
Others	Total power	2kW
Others	Overall size	550mm x 350mm x 500mm

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