1500℃ single heating zone high vacuum CVD system with 3-channel mass flow meter HS-O1500-60IT-3Z-HV

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Product Details

1500℃ single heating zone high vacuum CVD system consists of a 1500℃ single temperature zone tube furnace, a three-channel float flowmeter and a high vacuum molecular pump set. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment temperature rise and fall program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The furnace tube is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500℃. The heating element is made of high-quality silicon carbon rod, which can reach 1500℃ high temperature. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700℃.
The system is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

1500℃ single heating zone high vacuum CVD system applications:
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1500℃ single heating zone high vacuum CVD system technical parameters:

Vacuum tube furnace	Model	HS-O1500-60IT
	Tube material	High purity alumina
	Tube diameter	60mm (optional 50mm, 80mm, 100mm)
	Tube length	1000mm
	Furnace chamber length	400mm
	Heating zone length	300mm
	Constant temperature zone	150mm
	Operating temperature	≤1450℃
	Temperature control accuracy	±1℃
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
Gas supply system	Model	HS-3Z
	Gas channel	3-channel
	Measuring unit	Gas mass flow meter
	Measuring range	A channel: 0～100SCCM H2 gas	Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
		B channel: 0～300SCCM N2 gas
		C channel: 0～500SCCM Ar gas
	measurement accuracy	±1.0%F.S
	Pipe pressure resistance	3MPa
	Working pressure difference	50～300KPa
	Connecting pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface specification	1/4" ferrule connector for gas inlet and outlet
Exhaust system	Model	HS-GZK103-A
	Molecular pump	HS-600
	Backing pump	Rotary vane pump
	Pumping rate	Molecular pump: 600L/S	Comprehensive gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa
		Rotary vane pump: 1.1L/S
	Pumping interface	KF40
	Exhaust interface	KF16
	Vacuum measurement	Compound vacuum gauge: Resistance gauge + ionization gauge
	Ultimate vacuum	1.0E-5Pa
	Power supply	AC:220V 50/60Hz

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