| Item | Detail |
| Model | HS-1700X-SPC-2 |
| Supply voltage | AC220V, 60Hz |
| Maximum power | 800W |
| Sample stage |
Diameter φ50mm; Rotatable, 5rpm; The distance between the sample stage and the evaporation source is adjustable, adjustment range 60mm-100mm |
| Quartz chamber | O.Dφ180mm x I.Dφ166mm x 235mm |
| Maximum temperature | 1700℃ |
| Thermocouple | S type thermocouple, working temperature 200℃ ~ 1500℃ |
| Vacuum gauge | Electronic vacuum gauge |
| Vacuum interface | KF16 |
| Intake interface | 1/4NPS |
| Vacuum pump | Double stage rotary vane vacuum pump |