Small high vacuum two-in-one film coater

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Product Details

The plasma sputtering and evaporating two-in-one film coater is equipped with DC sputtering target and thermal evaporation assembly, which can be used not only for plasma sputtering, but also obtain carbon or other metal simple films by evaporation. In order to improve the coating quality, this two-in-one film coater adopts stainless steel vacuum chamber with high vacuum design of precision molecular pump, high vacuum degree can effectively improve the purity and uniformity of coating, which is conducive to get better experimental results. The sample stage has the function of rotation and heating, which can improve the film adhesion and film uniformity. The instrument is small in size, saves space, and can be placed on the test bench. It is very suitable for universities and research institutions.
Small high vacuum two-in-one film coater applications:
Scanning electron microscope sample surface gold spraying, steaming gold, carbon spraying and other operations, as well as the preparation of non-conductor material test electrodes.

Small high vacuum two-in-one film coater technical parameters:

Small high vacuum two-in-one film coater
Sample stage	Size	φ138mm	Temperature accuracy	±1℃
Sample stage	Heating temperature	Max 500℃	Rotary speed	1-20rpm adjustable
DC sputtering head	Quantity	2” ×1
Evaporation system	Evaporation source	Tungsten wire basket	Max temperature	1700℃
Evaporation system	Thermocouple	S type thermocouple
Vacuum chamber	Chamber size	φ170mm × 200mm	Observation Window	Quartz observation window φ70
Vacuum chamber	Chamber material	Stainless steel	Opening way	Top cover open
Vacuum system	Model	HS-GZK103-A	Pumping interface	KF40
	Molecular pump	HS-600	Exhaust interface	KF16
	Backing pump	Rotary vane pump	Vacuum measurement	Compound vacuum gauge
	Ultimate vacuum	1.0E-5Pa
	Pumping rate	Molecular pump: 600L/S rotary Rotary vane pump: 1.1L/S comprehensive pumping performance: 20 minutes vacuum up to: 1.0E-3pa
Sputter power configuration	Quantity	DC power supply×1	Max output power	150w
Other parameters	Supply voltage	AC220V,50Hz	Dimensions	600mm×300mm×470mm
Other parameters	Total power	1.5kw	Total weight	40kg

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