Small two-in-one coating machine (plasma sputtering & thermal evaporation)

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Product Details

The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.
The instrument components are highly integrated, which realize two kinds of coating functions in the same chamber. This coating machine adopts high purity quartz chamber as vacuum chamber, and the coating process is completely visible. The instrument is equipped with two stage rotary vane vacuum pump, which can quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment required by most evaporation coating experiments and diode sputtering experiments. This instrument has small size which can save space and can be used on the test bench. One machine has multiple purposes, which is cost-effective and very suitable for major universities and research institutions to choose.
Small two-in-one coating machine applications:
Scanning electron microscope sample surface gold spraying, gold steaming carbon spraying and other operations, as well as the production of non-conductor material test electrode.

Technical parameters:

Small two-in-one coating machine HS-EVS180G-LV
Sample Stage	Size	φ80mm	Distance to the evaporation source	20mm~50mm adjustable
DC sputtering head	Number	2” ×1
Evaporation system	Evaporation source	Tungsten wire basket	Max Temperature	1700℃
Evaporation system	Thermal couple	S type thermocouple
Vacuum Chamber	Chamber Size	φ180mm×100mm	Watch Window	Omnidirectional transparency
Vacuum Chamber	Chamber Material	High purity quartz	Opening mode	Top cover removable
Vacuum System	Mechanical Pump	Rotary vane pump	Pumping connector	KF16
	vacuum measurement	Resistance gauge	Exhaust connector	KF16
	Ultimate vacuum	1.0E-1Pa	Power Supply	AC;220V 50/60Hz
	Pumping rate	Rotary vane pump：1.1L/S
Sputter Power Configuration	Number	DC power supply x1	Max Power Output	150w
Other	Supply Voltage	AC220V,50Hz	Overall size	360mm×300mm×470mm
Other	Total power	1.5kw	Total Weight	15kg

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