Fully automatic ultrasonic assisted atmosphere heating spin coater

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Product Details

HS-SPC-HUA6 is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.
1. The chamber is equipped with heating elements, which can be baked after spinning coating
2. The product has a gas path controlled by a 2-way float flowmeter, which can pass inert gas into the chamber to protect the glue liquid from the gas in the air when spinning coating
3. This machine is suitable for surface coating of semiconductor wafer, slide, wafer, substrate, ITO conductive glass and other processes and plate making.
4. The maximum size of the crystallizable wafer is 6 inches, the rotational speed can reach 10000rpm, and the acceleration can reach 5000rpm;
5. It has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the thickness of spinning coating.
Features of spin coater:
1. Adopt DC brushless motor, single chip microcomputer control
2. High-definition touch screen control
3. Single step and multi-step spinning coating operation can be carried out, five programs can be stored, and each program can be set with five steps of operation
4. Anti-blocking glue design
5. Aluminum alloy chamber, durable
6. It has various auxiliary functions such as ultrasonic, atmosphere, heating and so on, which can be used for spinning coating research

Technical parameters of spin coater:

Spin coater	Name	ultrasonic assisted atmosphere spin coater
	Substrate size	6inches
	Rotation speed	100~10000rpm adjustable
	Rotational acceleration	100~5000rpm/s adjustable
	Longest spinning time(a single time)	3000s
	chamber size	Φ200mm* 90mm
	Voltage	220V 50Hz
	Power	400W
	Heating Temp	0-100℃
	Warranty	1 year, life-long technical support, excluding vulnerable parts
Ultrasonic system	Atomizing head Material	Titanium alloy
	Frequency	40kHz
	Power	130W
	Flow	0.55mL/s
	Particle diameter	25um
	Atomizing head type	Cone type
	Atomizing head weight	0.3kg
	Ultrasonic power supply	Size:315312135mm,weight:5kg
Syringe pump	Flow range	0.001uL/min-43.349mL/min
	Power down memory function	Save the setting parameters, no need to set them after power on again
	Injector	10uL-1000uL
	Syringe	1mL-60mL
	Linear speed range	5um/min-65um/min
	Linear speed adjustment resolution	5um/min
	Maximum stroke	140mm
	Travel resolution	0.156um
	Rated linear thrust	＞90N
Flowmeter	Control gas type	2
Flowmeter	Gas flow rate	16-160mL/min

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