| Model No. | HS-GKF411 |
| Coating time | 1-99S |
| Time accuracy | ±5% |
| Coating speed | 0-8000RPM |
| Speed accuracy | ±3% |
| Working station | Two station |
| Purifying Effect | 100 grade(USA Federal Standard) |
| Operating area wind speed | 0.3-0.5m/s |
| Wafer dimension | 10mm-100mm wafer or other material |
| System control | PID Programmable control |
| Outer dimension | 800x680x1700mm |