Plasma Enhanced CVD system HS-PECVD-T01

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Product Details

In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.

Plasma Enhanced CVD system application range:
This equipment can be used in various test places such as graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.

Plasma Enhanced CVD system technical parameters:

Three-heating zone tube furnace	Model	HS-O1200-50IIIT
	Tube material	High purity quartz
	Tube diameter	50mm
	Tube length	2830mm
	Furnace chamber length	660mm
	Heating zone length	200mm+200mm+200mm
	Operating temperature	0～1100℃
	Temperature control accuracy	±1℃
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
Single-heating zone tube furnace	Model	HS-O1200-50IT
	Tube material	High purity quartz
	Tube diameter	50mm
	Tube length	2830mm
	Furnace chamber length	440mm
	Heating zone length	400mm
	Constant temperature zone	200mm
	Operating temperature	0～1100℃
	Temperature control accuracy	±1℃
	Temperature control mode	30 or 50 segment program temperature control
	Display mode	LCD
	Sealing method	304 stainless steel vacuum flange
	Flange interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V 50/60Hz
RF output system	Power range	0~500W adjustable
	Working frequency	13.56MHz+0.005%
	Working mode	Continuous output
	Display mode	LCD
	Matched impedance mode	Can match, the glow is evenly covered with three heating zone furnace tubes
	Power stability	≤2W
	Normal working reflected power	≤3W
	Amplified reflected power	≤70W
	Harmonic component	≤-50dBc
	Machine efficiency	≥70%
	Power Factor	≥90%
	Supply voltage / frequency	Single-phase AC (187V~153V) Frequency 50/60Hz
	Control mode	Internal control / PLC analog / RS232 / 485 communication
	Power protection settings	DC overcurrent protection, power amplifier over temperature protection, reflected power protection
	cooling method	Forced air cooling
	Glow length	In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones.
Gas supply system	Four-channel mass flowmeter	Mass flowmeter
	Flow range	MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar,
	measurement accuracy	±1.5%F.S
	Repeatability	±0.2%FS
	Linear precision	±1%F.S.
	Response time	≤4s
	Work pressure	-0.15Mpa~0.15Mpa
	flow control	LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control
	Intake interface	Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube
	Outlet interface	Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube
	Connection method	Double ferrule connector
	Operating temperature	5~45℃
	Gas premix	Equipped with gas premixing device
Exhaust system	Mechanical pump	Rotary vane pump
	Pumping rate	1.1L/S
	Exhaust interface	KF16
	Vacuum measurement	Resistance gauge
	Ultimate vacuum	1.0E-1Pa
	Power supply	AC:220V 50/60Hz
	Pumping interface	KF16
Rail	Rail length	2.5m~3m It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall.

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