Laboratory Flexible Metal Foil Electrode Preparation 1200 Celcius Single/Multi Heating Zone Double Tube Slide CVD System

Basic InfoModel NO.: HS-O1200-100IT-S3ZDCertification: TUVBrand: CykySpecification: O. D100*400mm heating zoneHS Code: 85143090Type: CVD Film PreparationStructure: Horizontal TypeTransport Package: Standard Ply Wooden BoxOrigin: Zhengzhou, ChinaProduct DescriptionLaboratory F

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Product Description
Laboratory Flexible metal foil electrode preparation 1200 celcius Single/Multi Heating zone

Double Tube Slide CVD system

Name	1200ºC Double Tube Single/Multi zone Slide CVD System
Model No.	HS-O1200-100IT-S3ZD	HS-O1200-100IIT-S3ZD	HS-O1200-100IIIT-S3ZT
Max Temper	1200ºC
Heating zone	420mm	610mm	940mm
Constant zone	210mm	400mm	700mm
Heating zone	Single zone	Double zone	Three zone
Quartz diameter	Inner diameter:Φ80mm Outer diameter:Φ100mm
Rated power	2.5Kw	4.8Kw	7.2Kw
Rated voltage	220V	220V	380V(three phase)
Sliding distance	290mm	485mm	650mm
Sliding method	Manual/Auto programmable control
Temperature control	PID Programmable control, 30 steps curves
Temperature accuracy	±1ºC
Double Tube Sealing Flange	Adopt double flange extensible multi-function double clamp connection,and independently inner tube and outer tube for vacuum and gas flow control.
Gas Control Method	Mass Flow Controller
Gas way	3 gas way
Flow speed range	0-500sccm, or as customized
Accuracy	±1%F.S
Response time	≤4sec
Working surrounding temperature	5-45ºC
Working pressure	Inlet Pressure 0.05-0.3Mpa
Vacuum range	10Pa-100Pa	1x10-3Pa-1x10-1Pa
Vacuum pump	Double stange mechanical pump, Vacuum:3x10-1Pa, Pump speed:4L/S,	Turbo pump set Vacuum:5x10-6Pa Pumping speed:1600L/S
Outer dimension	530×1440×750mm	530×1440×750mm
Gross weight	240Kg	340Kg