Anti-Corrosion Three Channel Gas Mixing Control(MFC) Station for CVD System HS-3Z

Application1.Semiconductor manufacturing industry2.Vacuum coating equipment3.Special material surface treatment4.Gas combustion control5.Leakage detection system6.Environment detection and analysis equipment7.Chemical, petrochemical, metallurgy, optical fiber and etcA&nbs

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Product Details

Application
1.Semiconductor manufacturing industry
2.Vacuum coating equipment
3.Special material surface treatment
4.Gas combustion control
5.Leakage detection system
6.Environment detection and analysis equipment
7.Chemical, petrochemical, metallurgy, optical fiber and etcA

Model no.	HS-3Z
Flow meter type	mass flow
Flow meter pipe core material	304 stainless steel
Valve type	electromagnetic regulating valve
Pipeline normal condition	close
Gas way	3 gas way
Connector size	1/4"
Measurement accuracy	±1.0%F.S
Linearity	±0.5%F.S
Repeat accuracy	±0.2%F.S
Pressure range	-0.1~0.15Mpa
A way range	0~100SCCM
B way range	0~200SCCM
C way range	0~500SCCM
flow control range	2%-100%
Zero temperature drift	0.6F.S(15-35℃)
Respond time	2S
Working temperature	15-50℃
Working power	AC 220V 50-60Hz