| Main parts | Item | Parameters |
| Cleaning the chamber | Chamber material | High purity quartz |
| Chamber size | Diameter 200 mm; Length 170 mm | |
| RF power supply | Power supply features | The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products. |
| Power advantage |
● Long time normal operation ● Simple and flexible operation ● High power supply efficiency and low heat generation ●With perfect reflection power protection function |
|
| RF power | 0~300W continuously adjustable | |
| Signal frequency | 13.56MHz ±0.005% | |
| Reflected power | ≤100W | |
| Power stability | ±0.1% | |
| RF connector | N type connector | |
| Machine efficiency | ≥75% | |
| Harmonic component | ≤-50 dBc | |
| cooling method | Forced air cooling | |
| Gas measurement | Measuring unit | Float flowmeter |
| Gas channel | Two channels | |
| A channel range | 10~100ml | |
| B channel range | 16~160ml | |
| Vacuum | Vacuum measurement | Digital vacuum gauge (resistance gauge) |
| Vacuum pump | Two-stage rotary vane vacuum pump | |
| Motor speed | 50 Hz: 1440; 60 Hz: 1720 | |
| Pumping rate | 50 Hz: 1.1L/s; 60 Hz: 1.3L/s | |
| Vacuum range | 0.1Pa~10000Pa | |
| Ultimate vacuum | 0.5Pa | |
| Motor noise | ≤56dB | |
| Pipe interface | Gas inlet: KF16; exhaust port KF16. | |
| Connecting pipe | KF16 vacuum bellows | |
| Vacuum valve | Solenoid valve | |
| Motor Power | 400W | |
| Others | Power supply | AC220V 50/60Hz |
| Total power | 800W | |
| Operating temperature | -10℃- 40℃ | |
| Working vacuum | ≤40Pa | |
| Overall size | 600mm×650mm×560mm | |
| Total Weight | 80kg (including packaging) |