System standard accessories |
Equipment size |
1105W * 1488D * 1842Hmm (2158mm with signal light height) |
Horizontal plate |
8layer |
battery lead plate |
402W * 450Dmm |
Gas flow controller |
2-circuit process gases, 0-300ml/min |
Vacuum measurement |
Japanese ulvac vacuum gauge |
Human machine interface touch screen |
SD independent research and development |
Electrode spacing |
48mm |
Signal indicator |
3 ribbon alert |
Vacuum pump |
90m3/h bipolar oil pump |
System Power & Machinery |
Power supply |
AC380V, 50/60Hz . Rated power 5000W |
System weight (device host / vacuum pump) |
<600Kg |
Equipment host size |
1805(W)×1988(D)×1842(H) mm |
RF power supply |
RF power frequency |
13.56MHz |
RF power supply |
1000W |
RF power matcher |
Fully automatic matching, leading air capacitance technology |
Equipment necessary conditions |
Power supply |
AC380V, 50/60Hz, three-phase five-wire , 7.5KVA |
Compressed air requirements |
Anhydrous oil-free CDA 60~90psig |
Air draft system |
≥ 2 cubic / minute, the central exhaust gas treatment pipeline can be |
System ambient temperature requirements |
≤30℃(best room temperature) |
Process gas requirements |
15~20psig Purity 99.996% or above |