Desktop single target magnetron sputtering coater with reciprocating sample table

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Product Details

Desktop single target magnetron coater is a high cost performance magnetron sputtering coating equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Desktop single target magnetron coater application range:
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.

Technical parameters of single target magnetron sputtering coater:

Reciprocating sample table	size		50*100mm
	Reciprocating speed		0~50mm/s
Magnetron target gun	Target head plane		Circular flat target
	Sputtering vacuum		10Pa～0.2Pa
	Target diameter		2 inches
	Target thickness		Recommended 2~5mm
	Target head temperature		≦65℃
Vacuum chamber	Chamber size		About Φ180mm × H 215mm
	Chamber material		High purity quartz
	Observation window		Omnidirectional transparency
	Opening method		Removable top cover
Power supply	DC power supply		150W max
	Quantity		1
Molecular pump system	Backing pump	Rotary vane pump	VRD-4
		Pumping speed	1.1L/S
		Ultimate vacuum	5*10^-1Pa
	Molecular pump	Molecular pumping speed	600L/S
		Rated speed	24000rpm
		Ultimate vacuum	5*10^-5Pa
		Vibration value	≦0.1um
		Start Time	≦4.5min
		Downtime	<7min
		cooling method	Water cooling + air cooling
Water chiller	Cooling water temperature		≦37℃
	Cooling water flow rate		10L/min
Supply voltage			AC220V 50Hz

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